Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD - Archive ouverte HAL
Conference Papers Year : 2002

Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD

V. Rouessac
Institut Européen des membranes
CV
Florence Bosc
CV
Jose Sanchez
  • Function : Author
  • PersonId : 864010
Institut Européen des membranes
Jean Durand
  • Function : Author
  • PersonId : 866472
Institut Européen des membranes

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Materials Science [cond-mat.mtrl-sci]

Vincent Rouessac  : Connect in order to contact the contributor

https://hal.science/hal-01741467

Submitted on : Friday, March 23, 2018-10:31:11 AM

Last modification on : Thursday, April 11, 2024-1:08:12 PM

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hal-01741467 , version 1 (23-03-2018)

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  • HAL Id : hal-01741467 , version 1

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V. Rouessac, Florence Bosc, Jose Sanchez, Jean Durand. Sorption and permeation characteristics of hybrid organosilicon thin films deposited by PECVD. ICIM7 Conference, Jun 2002, Dalian, China. ⟨hal-01741467⟩

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