Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes - Archive ouverte HAL Access content directly
Journal Articles Applied Physics Letters Year : 2017
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hal-01741061 , version 1 (22-03-2018)

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Rami Khazaka, Jean-François Michaud, Philippe Vennegues, Daniel Alquier, Marc Portail. Turning the undesired voids in silicon into a tool: In-situ fabrication of free-standing 3C-SiC membranes. Applied Physics Letters, 2017, 110 (8), ⟨10.1063/1.4977033⟩. ⟨hal-01741061⟩
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