Reconstruction of a high angle tilt (110)/(001) boundary in Si using O-lattice theory - Archive ouverte HAL
Article Dans Une Revue Solid State Phenomena Année : 2011

Reconstruction of a high angle tilt (110)/(001) boundary in Si using O-lattice theory

Résumé

High angle close to 90° tilt Si boundary created by direct wafer bonding (DWB) using SmartCut® technology is studied in this work. Experimental identification of defects and morphologies at the interface is realized using conventional transmission electron microscopy (TEM) and geometric phase analysis (GPA) of high-resolution TEM images. Atom reconstruction of the interface along the direction is carried out within the frame of the O-lattice theory. We demonstrate that to preserve covalent bonding across the interface it should consist of facets intersected by a maximum of six planes with three 90° Shockley dislocations per facet. For a long enough interface the formation of Frank dislocations is predicted with a period equal 6 times that of Shockley dislocations. Long range undulations of the interface are shown to be related directly to a deviation from exact 90° tilt of the layer with respect to the substrate.
Fichier non déposé

Dates et versions

hal-01736039 , version 1 (16-03-2018)

Identifiants

Citer

Nikolay Cherkashin, O. Kononchuk, Martin Hÿtch. Reconstruction of a high angle tilt (110)/(001) boundary in Si using O-lattice theory. Solid State Phenomena, 2011, 178-179, pp.489-494. ⟨10.4028/www.scientific.net/SSP.178-179.489⟩. ⟨hal-01736039⟩
48 Consultations
0 Téléchargements

Altmetric

Partager

More