<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-01730196</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-17T18:57:44+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor</title>
            <author role="aut">
              <persName>
                <forename type="first">Giorgos</forename>
                <surname>Gakis</surname>
              </persName>
              <idno type="idhal" notation="numeric">1272455</idno>
              <idno type="halauthorid" notation="string">2467561-1272455</idno>
              <idno type="IDREF">https://www.idref.fr/223410691</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-3879-7276</idno>
              <affiliation ref="#struct-58785"/>
              <affiliation ref="#struct-437012"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Hugues</forename>
                <surname>Vergnes</surname>
              </persName>
              <email type="md5">1cb988f1220d2dc5318bd6c086f57284</email>
              <email type="domain">ensiacet.fr</email>
              <idno type="idhal" notation="string">hugues-vergnes</idno>
              <idno type="idhal" notation="numeric">1423676</idno>
              <idno type="halauthorid" notation="string">742279-1423676</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-3511-5436</idno>
              <affiliation ref="#struct-437012"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Emmanuel</forename>
                <surname>Scheid</surname>
              </persName>
              <email type="md5">cdbf52039550a2ff4564218dd31ea38e</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="numeric">1115628</idno>
              <idno type="halauthorid" notation="string">1564572-1115628</idno>
              <idno type="IDREF">https://www.idref.fr/033228450</idno>
              <orgName ref="#struct-441569"/>
              <affiliation ref="#struct-390153"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Constantin</forename>
                <surname>Vahlas</surname>
              </persName>
              <email type="md5">bf6cc7e6f5ece27bc549a9792f327540</email>
              <email type="domain">ensiacet.fr</email>
              <idno type="idhal" notation="string">constantin-vahlas</idno>
              <idno type="idhal" notation="numeric">740043</idno>
              <idno type="halauthorid" notation="string">47616-740043</idno>
              <idno type="IDREF">https://www.idref.fr/068631081</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-5911-0296</idno>
              <affiliation ref="#struct-580"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Brigitte</forename>
                <surname>Caussat</surname>
              </persName>
              <email type="md5">dc40bbc956b0f1a3c814f6acbd221b4c</email>
              <email type="domain">ensiacet.fr</email>
              <idno type="idhal" notation="string">brigitte-caussat</idno>
              <idno type="idhal" notation="numeric">795602</idno>
              <idno type="halauthorid" notation="string">1615221-795602</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-4238-2919</idno>
              <idno type="IDREF">https://www.idref.fr/081118465</idno>
              <idno type="VIAF">https://viaf.org/viaf/189569029</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/L-3514-2013</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/L-3514-2013</idno>
              <affiliation ref="#struct-437012"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Andreas G.</forename>
                <surname>Boudouvis</surname>
              </persName>
              <idno type="halauthorid">518939-0</idno>
              <affiliation ref="#struct-58785"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Open Archive Toulouse Archive Ouverte</forename>
                <surname>(OATAO)</surname>
              </persName>
              <email type="md5">ac3f71840d50da799c1bb19c7b808bac</email>
              <email type="domain">listes-diff.inp-toulouse.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2018-03-13 09:34:35</date>
              <date type="whenModified">2026-01-30 10:00:02</date>
              <date type="whenReleased">2018-03-13 09:55:14</date>
              <date type="whenProduced">2018-04</date>
              <date type="whenEndEmbargoed">2018-09-02</date>
              <ref type="file" target="https://hal.science/hal-01730196v1/document">
                <date notBefore="2018-09-02"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://hal.science/hal-01730196v1/file/Gakis_19671.pdf" id="file-1730196-1770620">
                <date notBefore="2018-09-02"/>
              </ref>
              <ref type="externalLink" target="http://oatao.univ-toulouse.fr/19671/1/Gakis_19671.pdf"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="146910">
                <persName>
                  <forename>Open Archive Toulouse Archive Ouverte</forename>
                  <surname>(OATAO)</surname>
                </persName>
                <email type="md5">ac3f71840d50da799c1bb19c7b808bac</email>
                <email type="domain">listes-diff.inp-toulouse.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-01730196</idno>
            <idno type="halUri">https://hal.science/hal-01730196</idno>
            <idno type="halBibtex">gakis:hal-01730196</idno>
            <idno type="halRefHtml">&lt;i&gt;Chemical Engineering Research and Design&lt;/i&gt;, 2018, 132, pp.795-811. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.cherd.2018.02.031"&gt;&amp;#x27E8;10.1016/j.cherd.2018.02.031&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Chemical Engineering Research and Design, 2018, 132, pp.795-811. &amp;#x27E8;10.1016/j.cherd.2018.02.031&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-1730196-1770620"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE2">Université Toulouse 2</idno>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-TOULOUSE">Institut National des Sciences Appliquées de Toulouse</idno>
            <idno type="stamp" n="LAAS">Laboratoire d'analyse et d'architecture des systèmes</idno>
            <idno type="stamp" n="UT1-CAPITOLE">Université Toulouse 1 Capitole</idno>
            <idno type="stamp" n="LAAS-MPN" corresp="LAAS-MICRO-NANO-BIO-TECHNOLOGIES">Équipe Matériaux et Procédés pour la Nanoélectronique</idno>
            <idno type="stamp" n="LAAS-MICRO-NANO-BIO-TECHNOLOGIES" corresp="LAAS">LAAS-Micro Nano Bio Technologies</idno>
            <idno type="stamp" n="INC-CNRS">Institut de Chimie du CNRS</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="TEST-HALCNRS">Collection test HAL CNRS</idno>
            <idno type="stamp" n="LGC">Laboratoire de Génie Chimique</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="CIRIMAT">Centre Interuniversitaire de Recherche et d’Ingénierie des Matériaux</idno>
            <idno type="stamp" n="TEST7-HALCNRS">test 7 du portail hal cnrs</idno>
            <idno type="stamp" n="IUT_UT3">IUT Paul Sabatier</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Giorgos</forename>
                    <surname>Gakis</surname>
                  </persName>
                  <idno type="idhal" notation="numeric">1272455</idno>
                  <idno type="halauthorid" notation="string">2467561-1272455</idno>
                  <idno type="IDREF">https://www.idref.fr/223410691</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-3879-7276</idno>
                  <affiliation ref="#struct-58785"/>
                  <affiliation ref="#struct-437012"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Hugues</forename>
                    <surname>Vergnes</surname>
                  </persName>
                  <email type="md5">1cb988f1220d2dc5318bd6c086f57284</email>
                  <email type="domain">ensiacet.fr</email>
                  <idno type="idhal" notation="string">hugues-vergnes</idno>
                  <idno type="idhal" notation="numeric">1423676</idno>
                  <idno type="halauthorid" notation="string">742279-1423676</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-3511-5436</idno>
                  <affiliation ref="#struct-437012"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Emmanuel</forename>
                    <surname>Scheid</surname>
                  </persName>
                  <email type="md5">cdbf52039550a2ff4564218dd31ea38e</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="numeric">1115628</idno>
                  <idno type="halauthorid" notation="string">1564572-1115628</idno>
                  <idno type="IDREF">https://www.idref.fr/033228450</idno>
                  <orgName ref="#struct-441569"/>
                  <affiliation ref="#struct-390153"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Constantin</forename>
                    <surname>Vahlas</surname>
                  </persName>
                  <email type="md5">bf6cc7e6f5ece27bc549a9792f327540</email>
                  <email type="domain">ensiacet.fr</email>
                  <idno type="idhal" notation="string">constantin-vahlas</idno>
                  <idno type="idhal" notation="numeric">740043</idno>
                  <idno type="halauthorid" notation="string">47616-740043</idno>
                  <idno type="IDREF">https://www.idref.fr/068631081</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-5911-0296</idno>
                  <affiliation ref="#struct-580"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Brigitte</forename>
                    <surname>Caussat</surname>
                  </persName>
                  <email type="md5">dc40bbc956b0f1a3c814f6acbd221b4c</email>
                  <email type="domain">ensiacet.fr</email>
                  <idno type="idhal" notation="string">brigitte-caussat</idno>
                  <idno type="idhal" notation="numeric">795602</idno>
                  <idno type="halauthorid" notation="string">1615221-795602</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-4238-2919</idno>
                  <idno type="IDREF">https://www.idref.fr/081118465</idno>
                  <idno type="VIAF">https://viaf.org/viaf/189569029</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/L-3514-2013</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/L-3514-2013</idno>
                  <affiliation ref="#struct-437012"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Andreas G.</forename>
                    <surname>Boudouvis</surname>
                  </persName>
                  <idno type="halauthorid">518939-0</idno>
                  <affiliation ref="#struct-58785"/>
                </author>
              </analytic>
              <monogr>
                <idno type="localRef">Rapport LAAS n° 18066</idno>
                <idno type="halJournalId" status="VALID">11609</idno>
                <idno type="issn">0263-8762</idno>
                <idno type="eissn">1744-3563</idno>
                <title level="j">Chemical Engineering Research and Design</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">132</biblScope>
                  <biblScope unit="pp">795-811</biblScope>
                  <date type="datePub">2018-04</date>
                  <date type="dateEpub">2018-03-02</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.cherd.2018.02.031</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">ALD</term>
                <term xml:lang="en">Film uniformity</term>
                <term xml:lang="en">CFD</term>
                <term xml:lang="en">Alumina</term>
                <term xml:lang="en">TMA</term>
                <term xml:lang="en">Water</term>
              </keywords>
              <classCode scheme="halDomain" n="chim.geni">Chemical Sciences/Chemical engineering</classCode>
              <classCode scheme="halDomain" n="spi.meca.mefl">Engineering Sciences [physics]/Mechanics [physics.med-ph]/Fluids mechanics [physics.class-ph]</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>A three-dimensional Computational Fluid Dynamics model is built for a commercial Atomic Layer Deposition (ALD) reactor, designed to treat large area 20 cm substrates. The model aims to investigate the effect of the reactor geometry and process parameters on the gas flow and temperature fields, and on the species distribution on the heated substrate surface, for the deposition of Al2O3 films from trimethyl aluminum and H2O. The investigation is performed in transient conditions, without considering any surface reaction. A second CFD model is developed for the feeding system of the reactor, in order to calculate the unknown reactant inlet flow rates. The two models are coupled via a computational strategy dictated by the available experimental measurements. Results show that a purging flow entering the reactor through its loading door affects the flow field above the substrate surface and causes non-uniformity in the temperature and reactants concentration on the substrate surface. During the TMA pulse, a recirculation sets in above the substrate surface, leading to a non-uniform distribution of species on the surface.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-58785" status="VALID">
          <idno type="ROR">https://ror.org/03cx6bg69</idno>
          <orgName>National Technical University of Athens</orgName>
          <orgName type="acronym">NTUA</orgName>
          <desc>
            <address>
              <addrLine>Patission Complex, 42, Patission str, 10682 Athens Zografou Campus - 9, Iroon Polytechniou str - 15780 Zografou, Athens</addrLine>
              <country key="GR"/>
            </address>
            <ref type="url">https://www.ntua.gr/en/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-437012" status="OLD">
          <idno type="IdRef">085790605</idno>
          <idno type="ISNI">0000 0000 8797 4983</idno>
          <idno type="RNSR">199511947M</idno>
          <idno type="ROR">https://ror.org/003jnac13</idno>
          <orgName>Laboratoire de Génie Chimique</orgName>
          <orgName type="acronym">LGC</orgName>
          <date type="start">1992-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>4 allee Emile Monso 31432 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://lgc.cnrs.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation name="UMR5503" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-390153" status="OLD">
          <orgName>Équipe Matériaux et Procédés pour la Nanoélectronique</orgName>
          <orgName type="acronym">LAAS-MPN</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/mpn</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-580" status="OLD">
          <idno type="IdRef">188393080</idno>
          <idno type="ISNI">0000000403826975</idno>
          <idno type="RNSR">199911771D</idno>
          <idno type="ROR">https://ror.org/03xhggy77</idno>
          <idno type="Wikidata">Q30262523</idno>
          <orgName>Centre interuniversitaire de recherche et d'ingénierie des matériaux</orgName>
          <orgName type="acronym">CIRIMAT</orgName>
          <date type="start">1999-01-01</date>
          <date type="end">2024-12-31</date>
          <desc>
            <address>
              <addrLine>Université de Toulouse, Toulouse-INP, CNRS, CIRIMAT, Toulouse - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://cirimat.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-301366" type="direct"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UMR5085" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-459" status="OLD">
          <idno type="IdRef">199278792</idno>
          <idno type="ISNI">0000 0001 2188 216X </idno>
          <idno type="RNSR">199517454Y</idno>
          <idno type="ROR">https://ror.org/03vcm6439</idno>
          <orgName>Laboratoire d'analyse et d'architecture des systèmes</orgName>
          <orgName type="acronym">LAAS</orgName>
          <date type="start">1968-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>7 Av du colonel Roche 31077 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laas.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-81148" type="direct"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation name="UPR8001" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-81148" status="VALID">
          <idno type="IdRef">026404354</idno>
          <idno type="ISNI">0000000121902837</idno>
          <idno type="ROR">https://ror.org/0443n9e75</idno>
          <orgName>Université Toulouse Capitole</orgName>
          <orgName type="acronym">UT Capitole</orgName>
          <date type="start">1970-01-01</date>
          <desc>
            <address>
              <addrLine>2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ut-capitole.fr/</ref>
          </desc>
          <listRelation>
            <relation name="443875" active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-116255" status="VALID">
          <idno type="IdRef">026388766</idno>
          <idno type="ISNI">0000 0001 2286 8343</idno>
          <idno type="ROR">https://ror.org/01h8pf755</idno>
          <idno type="Wikidata">Q858979</idno>
          <orgName>Institut National des Sciences Appliquées - Toulouse</orgName>
          <orgName type="acronym">INSA Toulouse</orgName>
          <date type="start">1963-10-21</date>
          <desc>
            <address>
              <addrLine>135, avenue de Rangueil - 31077 Toulouse cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-toulouse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116256" status="VALID">
          <idno type="IdRef">026403994</idno>
          <idno type="ROR">https://ror.org/04ezk3x31</idno>
          <orgName>Université Toulouse - Jean Jaurès</orgName>
          <orgName type="acronym">UT2J</orgName>
          <date type="start">1971-01-01</date>
          <desc>
            <address>
              <addrLine>5 allées Antonio Machado - 31058 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-301366" status="OLD">
          <orgName>Institut Universitaire de Technologie - Paul Sabatier</orgName>
          <orgName type="acronym">IUT Toulouse Auch Castres</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>Université Toulouse III - 115C, route de Narbonne - 31077 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://iut.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>