Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive RF magnetron discharge - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Surface and Coatings Technology Année : 2018

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive RF magnetron discharge

Résumé

Molybdenum nitride thin films were deposited on (100) silicon substrates by R.F. magnetron sputtering of a Mo target in a (Ar-N2) gas mixtures. The films were studied by Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS) and X-ray diffraction. The nanomechanical properties have been determined by nanoindentation and Peak-Force Quantitative Nanomechanical Mapping (PF-QNM). The total internal stresses were determined by curvature measurements and the Stoney formula. As thin film composition influences the morphology, the stress state and the mechanical properties, modifications are expected in this study where the nitrogen content is tuned. The film exhibits a polycrystalline structure with preferred orientation along (111) plane. The increase of the nitrogen content in the coating (N/Mo =1.1) induces a broadening of the full width at half maximum (FWHM) of the (111) diffraction peak, which is attributed to the presence of smaller crystallites. The residual stress and mechanical properties variation were correlated to the structural transition from γ-Mo2N to hexagonal and cubic MoN. The results show a good agreement between the nanomechanical properties obtained by nanoindentation and PF-QNM.
Fichier principal
Vignette du fichier
LaBoMaP_SURFCOAT_2018_BESNARD.pdf (902.91 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01728041 , version 1 (09-03-2018)

Identifiants

Citer

Boudjemaa Bouaouina, Aurélien Besnard, Seddik El Hak Abaidia, Aissam Airoudj, Fayçal Bensouici. Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive RF magnetron discharge. Surface and Coatings Technology, 2018, 333, pp.32-38. ⟨10.1016/j.surfcoat.2017.10.028⟩. ⟨hal-01728041⟩
151 Consultations
536 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More