Effect of ion bombardment on the structural and optical properties of TiO 2 thin films deposited from oxygen/titanium tetraisopropoxide inductively coupled plasma - Archive ouverte HAL
Journal Articles Thin Solid Films Year : 2015

Effect of ion bombardment on the structural and optical properties of TiO 2 thin films deposited from oxygen/titanium tetraisopropoxide inductively coupled plasma

D. Li
  • Function : Author
Michel Carette
Laboratoire Chimie Provence
A. Granier
  • Function : Author
J.P. Landesman
  • Function : Author
Institut des Matériaux Jean Rouxel
A. Goullet
  • Function : Author
Institut des Matériaux Jean Rouxel

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Materials Science [cond-mat.mtrl-sci]

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https://hal.science/hal-01725497

Submitted on : Wednesday, March 7, 2018-3:08:34 PM

Last modification on : Thursday, April 11, 2024-1:08:12 PM

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hal-01725497 , version 1 (07-03-2018)

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D. Li, Michel Carette, A. Granier, J.P. Landesman, A. Goullet. Effect of ion bombardment on the structural and optical properties of TiO 2 thin films deposited from oxygen/titanium tetraisopropoxide inductively coupled plasma. Thin Solid Films, 2015, 589, pp.783 - 791. ⟨10.1016/j.tsf.2015.07.015⟩. ⟨hal-01725497⟩

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