Journal Articles
Thin Solid Films
Year : 2015
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https://hal.science/hal-01725497
Submitted on : Wednesday, March 7, 2018-3:08:34 PM
Last modification on : Thursday, April 11, 2024-1:08:12 PM
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D. Li, Michel Carette, A. Granier, J.P. Landesman, A. Goullet. Effect of ion bombardment on the structural and optical properties of TiO 2 thin films deposited from oxygen/titanium tetraisopropoxide inductively coupled plasma. Thin Solid Films, 2015, 589, pp.783 - 791. ⟨10.1016/j.tsf.2015.07.015⟩. ⟨hal-01725497⟩
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