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Journal Articles Journal of Applied Physics Year : 2013

On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

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hal-01721058 , version 1 (25-05-2022)

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K. N. Nguyen, Philippe Basset, F. Marty, Yamin Leprince-Wang, Tarik Bourouina. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩
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