Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2002
Fichier non déposé

Dates et versions

hal-01694312 , version 1 (27-01-2018)

Identifiants

Citer

Olivier Gigan, Hua Chen, Olivier Robert, Gilles Amendola, Olivier Français, et al.. Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding. SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, Dec 2002, Melbourne, Australia. ⟨10.1117/12.469740⟩. ⟨hal-01694312⟩
300 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Mastodon Facebook X LinkedIn More