Optical Feedback Interferometry for Raster Scan Profilometry
Résumé
This paper evaluates optical feedback interferome-try for raster scan profilometry applications. It is shown both experimentally and theoretically that the spot size on target plays a major role as the phase distribution of the scattering contributions impacts drastically the sensor signal.
| Origine | Fichiers produits par l'(les) auteur(s) |
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