Humidity and Temperature Dependences of the Adsorption and Desorption Rates for Acetone and Xylene on Silicon Wafer - Archive ouverte HAL Access content directly
Journal Articles Journal of The Electrochemical Society Year : 2010

Humidity and Temperature Dependences of the Adsorption and Desorption Rates for Acetone and Xylene on Silicon Wafer

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hal-01683092 , version 1 (12-01-2018)

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S. Tlili, L. I. Gligorovski, Brice Temime-Roussel, S. Gligorovski, H. Wortham. Humidity and Temperature Dependences of the Adsorption and Desorption Rates for Acetone and Xylene on Silicon Wafer. Journal of The Electrochemical Society, 2010, 157 (5), ⟨10.1149/1.3321964⟩. ⟨hal-01683092⟩
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