Investigation of the Si-rich silicon oxide by 3D atom probe tomography - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2008

Investigation of the Si-rich silicon oxide by 3D atom probe tomography

Résumé

Silicon rich silicon oxide multilayers for optical devices have been investigated by laser assisted wide angle atom probe tomography. Three dimensional mapping of silicon nanoclusters multilayers was obtained. The composition of the different phases were deduced and compared to theoretical concentration. These results evidenced a size distribution of the Si clusters diameter and an incomplete phase separation between silica and silicon particles.
Fichier principal
Vignette du fichier
2008_Talbot_MRS_Fall2008.pdf (8.38 Mo) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

hal-01633462 , version 1 (23-11-2018)

Identifiants

Citer

Etienne Talbot, Rodrigue Lardé, Fabrice Gourbilleau, Christian Dufour, Philippe Pareige. Investigation of the Si-rich silicon oxide by 3D atom probe tomography. 2008 MRS Fall Meeting, Dec 2008, Boston, United States. ⟨10.1557/PROC-1111-D06-08-MM09-08⟩. ⟨hal-01633462⟩
150 Consultations
41 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More