The impact of negative-bias-temperature-instability on the carrier generation lifetime of metal-oxynitride-silicon capacitors - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Journal of Applied Physics Année : 2006

The impact of negative-bias-temperature-instability on the carrier generation lifetime of metal-oxynitride-silicon capacitors

S. N. Volkos
  • Fonction : Auteur
E. S. Efthymiou
  • Fonction : Auteur
I. D. Hawkins
  • Fonction : Auteur
A. R. Peaker
  • Fonction : Auteur
G. Petkos
  • Fonction : Auteur

Résumé

N-type metal-oxynitride-silicon capacitors were subjected to a negative bias voltage at an elevated temperature. Under this condition, Negative-bias-temperature-instability (NBTI) was evidenced in capacitance-voltage (CV) characteristics with an accompanying decrease, as determined from inversion layer-related (i.e., generation lifetime) deep-level-transient-spectroscopy (DLTS) measurements, in the carrier generation lifetime. An analysis of the dominant defect supplying minority carriers to the inversion layer at the silicon-oxynitride interface revealed a significant change brought about by NBTI. A full recovery of the carrier generation lifetime was observed after several days at zero bias voltage, and room temperature conditions had elapsed following NBTI. Concurrently, a passivation, as inferred from conventional DLTS measurements, of the NBTI-induced trap density occurred at the silicon-oxynitride interface. These relaxation and deactivation phenomena were discussed in the context of a plausible model involving a reaction at the silicon-oxynitride interface between trivalent silicon dangling bond defects and hydrogenous species.
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Dates et versions

hal-01633143 , version 1 (11-11-2017)

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Citer

S. N. Volkos, E. S. Efthymiou, S. Bernardini, I. D. Hawkins, A. R. Peaker, et al.. The impact of negative-bias-temperature-instability on the carrier generation lifetime of metal-oxynitride-silicon capacitors. Journal of Applied Physics, 2006, 100 (12), ⟨10.1063/1.2402346⟩. ⟨hal-01633143⟩
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