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Article Dans Une Revue Procedia Engineering Année : 2014

Direct laser patterning of a gas sensor on flexible substrate

Résumé

Flexible gas sensor fabricated by direct laser patterning and its gas sensing properties towards ozone and ammonia are reported. The flexible platform consists in Ti/Pt interdigited electrodes for gas detection and a microheater device. The platform validation has been realized by thermal simulation and its electrical properties have been also studied. The gas sensing properties were investigated using a commercial ink of ZnO nanoparticles at several concentrations and temperatures. The sensor presents excellent responses toward ammonia and ozone at 300 °C and 200 C° respectively, with good reproducibility, and fast response and recovery time in a wide range of concentrations.
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hal-01631654 , version 1 (13-11-2017)

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Monica Acuautla, S. Bernardini, L. Gallais, Marc Bendahan. Direct laser patterning of a gas sensor on flexible substrate. Procedia Engineering, 2014, EUROSENSORS 2014, the XXVIII edition of the conference series, 87, pp.899-902. ⟨10.1016/j.proeng.2014.11.300⟩. ⟨hal-01631654⟩
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