Diamond/ZnO/LiNbO3 structure for packageless acoustic wave sensors
Résumé
—This paper studies the Diamond/ZnO/LiNbO3 structure, numerically and experimentally, as a candidate for a packageless sensor based on the surface acoustic wave technology. The structure is compared with an AlN/ZnO/LiNbO3 structure, in order to highlight better performances of diamond with respect to AlN. Early experimental results of nanocrystalline diamond growth on ZnO/Si are presented.
Origine | Fichiers produits par l'(les) auteur(s) |
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