Comparison between Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmosphere - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Sensors and Actuators A: Physical Année : 2017

Comparison between Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmosphere

Omar Elmazria
Michel Hehn
Jaafar Ghanbaja
Pascal Boulet
Stéphane Mangin
Yong Xu

Résumé

—In this paper, we investigate the suitability of Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves (SAW) applications taking place above 800°C in air atmosphere. As expected, all films oxidize from 800°C in IrO 2 or Ir x Rh 1-x O 2 phase. The electrical properties of the latter remain compatible with the design of SAW devices, with a specific electrical resistance of 151 and 100 µΩ·cm for x = 0.7 and x = 0.85 respectively. Moreover, we observe that the Ir x Rh 1-x O 2 phase is much more stable regarding sublimation effect than the IrO 2 phase, highlighting the interest of alloying Ir with Rh for high-temperature applications. SAW devices based on langasite substrate and Ir 0.85 Rh 0.15 electrodes show a very good stability for at least several days at 800°C in air. In the case of Ir 0.7 Rh 0.3 electrodes, this stability is extended to temperatures up to 900°C.
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Dates et versions

hal-01628903 , version 1 (09-11-2017)

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Amine Taguett, Thierry Aubert, Omar Elmazria, Florian Bartoli, Marc Lomello, et al.. Comparison between Ir, Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 thin films as electrodes for surface acoustic waves applications above 800°C in air atmosphere. Sensors and Actuators A: Physical , 2017, 266, pp.211 - 218. ⟨10.1016/j.sna.2017.09.031⟩. ⟨hal-01628903⟩
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