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Article Dans Une Revue Nanotechnology Année : 2001

Tip-shape effects on electrostatic force microscopy resolution

Résumé

A detailed analysis of electrostatic interactions between a dc-biased tip and a metallic or insulating sample is presented. For inhomogeneous thin dielectric films, the scanning probe signal is shown to be proportional to the convolution between an effective surface profile and a response function of the microscope. Based on the properties of the response function, tip-shape effects on the lateral resolution in electrostatic force microscopy are discussed. For tip-sample distances D smaller than the tip radius R, the resolution is found to be proportional to (DR)1/2.

Dates et versions

hal-01626166 , version 1 (30-10-2017)

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Citer

S Gómez-Moñivas, L.S. Froufe-Pérez, Rémi Carminati, Jean-Jacques Greffet, Juan-José Sáenz. Tip-shape effects on electrostatic force microscopy resolution . Nanotechnology, 2001, 12 (4), pp.496-499 ⟨10.1088/0957-4484/12/4/323⟩. ⟨hal-01626166⟩
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