Integrated Racetrack Mocro-Resonator Based On Porous Silicon Ridge Waveguides
Résumé
Racetrack micro-resonator (MR), made from partially or totally oxidized porous silicon (PS) ridge waveguides fabricated with standard photolithography process, is reported. The design and the technological process are described including a study of waveguide dimensions that provide single mode propagation. Scanning electronic microscopy observations and optical characterizations clearly show that the MR based on PS ridge waveguides has been well implemented. As the MRs will be used for sensing application, we also present a preliminary theoretical study of the porous MRs sensitivity. A very promising theoretical sensitivity around 1200 nm/RIU (Refractive Index Unit) has been calculated for such porous racetrack MR.
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