@misc{marlec:hal-01588050, TITLE = {{ Study of the Post-nitridation of Strontium and Tantalum Based Oxide and Oxynitride Thin Films}}, AUTHOR = {Marlec, Florent and Le Gendre, Laurent and Le Paven, Claire and Chevir{\'e}, Fran{\c c}ois and Benzerga, Ratiba and Tessier, Franck and Chevaucherie, M. and Sharaiha, Ala}, URL = {https://hal-univ-rennes1.archives-ouvertes.fr/hal-01588050}, NOTE = {Poster}, HOWPUBLISHED = {{9th International Symposium on Nitrides and Related Materials (ISNT2017)}}, YEAR = {2017}, MONTH = Aug, HAL_ID = {hal-01588050}, HAL_VERSION = {v1}, }