Laser Scanning Thermomechanical Imaging of Microelectronic Devices - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2008

Laser Scanning Thermomechanical Imaging of Microelectronic Devices

Résumé

We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples.
Fichier non déposé

Dates et versions

hal-01553682 , version 1 (03-07-2017)

Identifiants

Citer

S. Grauby, A. Salhi, Jean-Michel Rampnoux, W. Claeys, S. Dilhaire. Laser Scanning Thermomechanical Imaging of Microelectronic Devices. Thermal Inveatigation of ICs and Systems, 2008. THERMINIC 2008. 14th International Workshop on, Sep 2008, Rome, Italy. pp.183-189, ⟨10.1109/THERMINIC.2008.4669905⟩. ⟨hal-01553682⟩

Collections

CNRS LOMA
36 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More