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Journal Articles Microelectronics Reliability Year : 2003

Application of picosecond ultrasonics to non-destructive analysis in VLSI circuits

Abstract

Picosecond ultrasonics is an optical non-destructive technique based on ultrasound generation and detection by ultrashort laser pulses. We demonstrate the efficiency of this technique for material characterization in VLSI circuits, and show the influence of the laser pulse duration on acoustic generation and detection.

Dates and versions

hal-01550917 , version 1 (29-06-2017)

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G. Andriamonje, V. Pouget, Y. Ousten, D. Lewis, Y. Danto, et al.. Application of picosecond ultrasonics to non-destructive analysis in VLSI circuits. Microelectronics Reliability, 2003, 43 (9-11), pp.1803-1807. ⟨10.1016/s0026-2714(03)00307-x⟩. ⟨hal-01550917⟩
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