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Article Dans Une Revue Applied optics Année : 2002

Surface displacement imaging by interferometry with a light emitting diode

Résumé

We present an imaging technique to measure static surface displacements of electronic components. A device is supplied by a transient current that creates a variation of temperature, thus a surface displacement. To measure the latter, a setup that is based on a Michelson interferometer is used. To avoid the phenomenon of speckle and the drawbacks inherent to it, we use a light emitting diode as the light source for the interferometer. The detector is a visible CCD camera that analyzes the optical signal containing the information of surface displacement of the device. Combining images, we extract the amplitude of the surface displacement. Out-of-plane surface-displacement images of a thermoelectric device are presented.
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Dates et versions

hal-01550826 , version 1 (29-06-2017)

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S. Dilhaire, Stéphane Grauby, S. Jorez, L. D. P. Lopez, Jean-Michel Rampnoux, et al.. Surface displacement imaging by interferometry with a light emitting diode. Applied optics, 2002, 41 (24), pp.4996-5001. ⟨10.1364/AO.41.004996⟩. ⟨hal-01550826⟩

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