Electron energy distribution function and plasma parameters across magnetic filters
Résumé
The electron energy distribution function (EEDF) is measured across a magnetic filter in inductively coupled plasmas. The measured EEDFs are found to be Maxwellian in the elastic energy range with the corresponding electron temperature monotonously decreasing along the positive gradient of the magnetic field. At the maximum of the magnetic field, the electron temperature reaches its minimum and remains nearly constant in the area of the negative gradient of the field, where the plasma density distribution exhibits a local minimum.