Fine-structure-resolved electron collisions from chlorine atoms in the (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>3/2</SUB><SUP>o</SUP> and (3p<SUP>5</SUP>)<SUP>2</SUP>P<SUB>1/2</SUB><SUP>o</SUP> states - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Physical Review A : Atomic, molecular, and optical physics [1990-2015] Année : 2013

Fine-structure-resolved electron collisions from chlorine atoms in the (3p5)2P3/2o and (3p5)2P1/2o states

Yang Wang
Oleg Zatsarinny
  • Fonction : Auteur
Klaus Bartschat
  • Fonction : Auteur
Jean-Paul Booth

Résumé

The B-spline R-matrix method is employed to calculate elastic electron scattering from chlorine atoms in the (3p5)2P3/2,1/2o states and electron-induced collisions between these two finestructure levels. The polarizability of the target states is accounted for by including polarized pseudostates in the close-coupling expansion, while relativistic effects are treated at the level of the semirelativistic Breit-Pauli approximation. We find the Ramsauer minimum in the elastic channels at a significantly lower projectile energy (≈0.2 eV) than previous calculations, due to an apparent strong sensitivity of the theoretical predictions on the details of the model, especially the target structure. The present results are relevant to the determination of chlorine atomic densities in Cl2-containing industrial plasma etch reactors.

Dates et versions

hal-01549405 , version 1 (28-06-2017)

Identifiants

Citer

Yang Wang, Oleg Zatsarinny, Klaus Bartschat, Jean-Paul Booth. Fine-structure-resolved electron collisions from chlorine atoms in the (3p5)2P3/2o and (3p5)2P1/2o states. Physical Review A : Atomic, molecular, and optical physics [1990-2015], 2013, 87, pp.022703. ⟨10.1103/PhysRevA.87.022703⟩. ⟨hal-01549405⟩
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