Electron transport parameters in NF<SUB>3</SUB> - Archive ouverte HAL
Article Dans Une Revue Journal of Physics D: Applied Physics Année : 2014

Electron transport parameters in NF3

V. A. Lisovskiy
  • Fonction : Auteur
V. D. Yegorenkov
  • Fonction : Auteur
P. Ogloblina
  • Fonction : Auteur
Jean-Paul Booth
S. Martins
  • Fonction : Auteur
K. Landry
  • Fonction : Auteur
D. Douai
  • Fonction : Auteur
V. Cassagne
  • Fonction : Auteur

Résumé

We present electron transport parameters (the first Townsend coefficient, the dissociative attachment coefficient, the fraction of electron energy lost by collisions with NF 3 molecules, the average and characteristic electron energy, the electron mobility and the drift velocity) in NF 3 gas calculated from published elastic and inelastic electron?NF 3 collision cross-sections using the BOLSIG code. Calculations were performed for the combined RB (Rescigno 1995 Phys. Rev. E 52 [http://dx.doi.org/10.1103/PhysRevA.52.329] 329 , Boesten et al 1996 J. Phys. B: At. Mol. Opt. Phys. 29 [http://dx.doi.org/10.1088/0953-4075/29/22/022] 5475 ) momentum-transfer cross-section, as well as for the JB (Joucoski and Bettega 2002 J. Phys. B: At. Mol. Opt. Phys. 35 [http://dx.doi.org/10.1088/0953-4075/35/4/303] 783 ) momentum-transfer cross-section. In addition, we have measured the radio frequency (rf) breakdown curves for various inter-electrode gaps and rfs, and from these we have determined the electron drift velocity in NF 3 from the location of the turning point in these curves. These drift velocity values are in satisfactory agreement with those calculated by the BOLSIG code employing the JB momentum-transfer cross-section.
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Dates et versions

hal-01549378 , version 1 (28-06-2017)

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Citer

V. A. Lisovskiy, V. D. Yegorenkov, P. Ogloblina, Jean-Paul Booth, S. Martins, et al.. Electron transport parameters in NF3. Journal of Physics D: Applied Physics, 2014, 47 (11), pp.115203. ⟨10.1088/0022-3727/47/11/115203⟩. ⟨hal-01549378⟩
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