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Article Dans Une Revue Journal of Instrumentation Année : 2015

Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence

Jean-Paul Booth
Olivier Guaitella
D. Bresteau
  • Fonction : Auteur
Louis Cabaret
  • Fonction : Auteur
Cyril Drag

Résumé

One of the most important, and difficult to measure, parameters of laboratory discharges in molecular gases is the gas translational temperature. We propose a novel technique to measure directly, with excellent spatial and temporal resolution, the velocity distribution of ground-state atoms (oxygen atoms in this case) in plasmas from the Doppler broadening of their laser excitation spectra. The method is based on the well-known Two-Photon Laser-induced Fluorescence (TALIF) technique, but uses a specially-built pulsed tunable ultraviolet laser with very narrow bandwidth which allows the Doppler profiles to be measured with high precision. This laser consists of a pulsed Nd:YAG-pumped Ti:Sapphire ring cavity which is injection-seeded by a single-mode cw Ti:sapphire laser. The single-mode infrared output pulses are frequency quadrupled by two non-linear crystals to reach the necessary UV wavelength (226 nm, 0.2 mJ) for TALIF excitation. This technique should be applicable to a wide range of discharges, ranging from low-pressure RF plasmas for surface processing to atmospheric pressure plasmas. Results of preliminary tests on low-pressure O 2 DC discharges are presented.
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Dates et versions

hal-01549365 , version 1 (28-06-2017)

Identifiants

Citer

Jean-Paul Booth, Daniil Marinov, Mickaël Foucher, Olivier Guaitella, D. Bresteau, et al.. Gas temperature measurements in oxygen plasmas by high-resolution Two-Photon Absorption Laser-induced Fluorescence. Journal of Instrumentation, 2015, 10 (11), pp.C11003. ⟨10.1088/1748-0221/10/11/C11003⟩. ⟨hal-01549365⟩
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