Full system for piezoelectric organic MEMS resonators operating in liquid media
Résumé
Here is presented a full compact system enabling the integrated actuation and measurement of the resonance frequency of piezoelectric organic MEMS resonators in liquid media. The resonators contain a piezoelectric layer made of PVDF-TrFE for both the actuation and the readout of the MEMS. They are included into a watertight enclosure associated with a PCB and a dedicated electronic card, allowing electrical measurements in air and liquid media. An application for viscosity measurements of water/glycerol mixtures is presented and shows that results match with measurements made with a viscometer, without any knowledge of the mass density.
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