AlGaP-growth and doping by MBE
Résumé
Here, we study the growth of n‐ and p‐doped AlGaP alloys on GaP substrate, in view of their use in laser devices. The impact of growth temperature and growth rate on structural and electrical properties is studied with atomic force microscopy, C(V), Hall effect measurements, SIMS analysis and deep level transient spectroscopy (DLTS). Typical structural defects are identified and characterized. As a main result, it is found that doping of the AlGaP is disabled when the growth temperature is not high enough. This is evidenced by DLTS measurements that reveal deep level trapping.