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Communication Dans Un Congrès Année : 2016

On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stress

Nicolas Guillaume
M. Le Berre
David Albertini
Nicolas Baboux
Francis Calmon

Résumé

The metal-insulator-metal (MIM) junction is a key building block for the development of different emerging nanoelectronic devices [1-3]. Under electrical stress, MIM junctions are subjected to high electric fields (>107 V.m-1) and high current densities which can cause irreversible electro-migration phenomena leading to the destruction of the complete device. Understanding and controlling these irreversible transformations are essential to ensure the reliability of various nanoelectronic devices including MIM junctions [4]. Here, we investigate the properties and characteristics of planar Ti/TiOx/Ti junctions which consist of transverse TiOx lines drawn on Ti test patterns (Fig. 1a). Junctions are elaborated by means of local anodic oxidation using atomic force microscopy. An irreversible morphological transformation occurring in a reproducible manner is observed when these planar junctions are electrically stressed under ambient atmosphere (Fig. 1b). Structural and chemical analyses based on transmission electron microscopy techniques reveal the extension of the initial amorphous TiOx (Fig. 1c & 1d) into a crystalline rutile phase (Fig. 1e & 1f). This irreversible transformation is proven to vanish completely if the electrical stress occurs under vacuum atmosphere, thus indicating the crucial role of oxygen from air in the process. Further issues such as the influence of surrounding atmosphere on electron transport will be discussed in the presentation.
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Dates et versions

hal-01489096 , version 1 (14-03-2017)

Identifiants

  • HAL Id : hal-01489096 , version 1

Citer

Etienne Puyoo, Nicolas Guillaume, M. Le Berre, David Albertini, Nicolas Baboux, et al.. On the irreversible transformation of Ti/TiOx/Ti junctions under electrical stress. Energy Materials and Nanotechnology, 2016, Prague, Czech Republic. ⟨hal-01489096⟩
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