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Communication Dans Un Congrès Année : 2016

Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron Transistors

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hal-01489069 , version 1 (14-03-2017)

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  • HAL Id : hal-01489069 , version 1

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Daniel Thomas, Etienne Puyoo, M. Le Berre, Liviu Militaru, S. Koneti, et al.. Shadow Edge Lithography coupled with ALD growth of Alumina and Platinum Nanoislands Towards the Fabrication of Single Electron Transistors. EMRS Fall Meeting, 2016, Warsaw, Poland. ⟨hal-01489069⟩
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