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Poster De Conférence Année : 2016

Integrated racetrack micro-resonator based on porous silicon ridge waveguides

Résumé

Racetrack micro-resonator (MR), made from partially or totally oxidized porous silicon (PS) ridge waveguides fabricated with standard photolithography process, is reported. The design and the technological process are described including a study of waveguide dimensions that provide single mode propagation. Scanning electronic microscopy observations and optical characterizations clearly show that the MR based on PS ridge waveguides has been well implemented. As the MRs will be used for sensing application, we also present a preliminary theoretical study of the porous MRs sensitivity. A very promising theoretical sensitivity around 1200 nm/RIU (Refractive Index Unit) has been calculated for such porous racetrack MR.
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Dates et versions

hal-01486870 , version 1 (15-11-2021)

Licence

Paternité - Pas d'utilisation commerciale

Identifiants

Citer

Luiz Poffo, Pauline Girault, Nathalie Lorrain, Jonathan Lemaitre, Mohammed Guendouz, et al.. Integrated racetrack micro-resonator based on porous silicon ridge waveguides. 18th International Conference on Transparent Optical Networks (ICTON 2016), Jul 2016, Trento, Italy. IEEE Xplore Digital Library, 2016, ⟨10.1109/ICTON.2016.7550641⟩. ⟨hal-01486870⟩
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