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Journal Articles Microelectronics Reliability Year : 2016

Automatic process for time-frequency scan of VLSI


Electro Optical Techniques (EOP : Electro Optical Probing and EOFM : Electro Optical Frequency Mapping) are effective backside contactless methods for defect localization and design debug for VLSI. The image mode (EOFM) gives only one frequency at each scan. In this case, the frequency mapping is a long and hard task. Furthermore, temporal information is not included in EOFM mode. Building a map by point by point EOP is usually too long so it cannot be used as it is to extract all the frequencies of interest in a region of interest. To overcome this limitation, we have developped an automatic process using EOP mode with a wavelets approach and autocorrelation. Temporal and frequency information are simultaneously computed with only one acquisition. We will underline the challenge and define application boundaries of this technique.
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hal-01465737 , version 1 (13-02-2017)



Anthony Boscaro, Sabir Jacquir, Kevin Melendez, Kevin Sanchez, Philippe Perdu, et al.. Automatic process for time-frequency scan of VLSI. Microelectronics Reliability, 2016, Proceedings of the 27th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 64, pp.299-305. ⟨10.1016/j.microrel.2016.07.052⟩. ⟨hal-01465737⟩
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