A novel deep-UV polymer for integrated photonics: from waveguides structures to taper-waveguides coupled to cascade of multistage resonators used as thermal sensors
Résumé
An overview of current research on integrated photonics based on the new UV210 phot-oresist is given. We report the overall design, fabrication and characterization of waveguides structures, multistage microresonators and their potential as thermal sensors.
| Origine | Accord explicite pour ce dépôt |
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