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Communication Dans Un Congrès Année : 2014

A novel deep-UV polymer for integrated photonics: from waveguides structures to taper-waveguides coupled to cascade of multistage resonators used as thermal sensors

Résumé

An overview of current research on integrated photonics based on the new UV210 phot-oresist is given. We report the overall design, fabrication and characterization of waveguides structures, multistage microresonators and their potential as thermal sensors.
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hal-01452368 , version 1 (01-02-2017)

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Rigoberto Castro-Beltran, David Pluchon, Daphné Duval, Marion Specht, N. Huby, et al.. A novel deep-UV polymer for integrated photonics: from waveguides structures to taper-waveguides coupled to cascade of multistage resonators used as thermal sensors. Latin America Optics and Photonics Conference (LAOP 2014), 2014, Cancun, Mexico. ⟨10.1364/LAOP.2014.LM4A.44⟩. ⟨hal-01452368⟩
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