Fabrication and characterization of gas detection microfluidic system
Résumé
In this study a gas detection microfluidic system was realized. Firstly, microfluidic and thermal simulations were done to determine the microsystem dimensions. Heat distribution was then simulated. These results allowed us the best material choices suited for the application. The microsystem has been realized with conventional microelectronic processes and was characterized to evaluate the heater thermal stability and the temperature gradient inside the microsystem. Finally, the gas sensor is exposed to ammonia concentrations between 10 and 100 ppm at 473 K.
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