Ammonia detection by a novel Pyrex microsystem based on thermal creep phenomenon
Résumé
Our research work aims to develop a microfluidic system for gas analysis by using an original
principle of integrated pumping. This microsystem can detect ammonia and the gas flow parameters
inside the channel can be also controlled. The proposed microdevice consists in a microchannel
including an integrated gas sensor with a heater. The trioxide tungsten (WO
3) is implemented as a sensitive layer. The integrated heater is used for two reasons: to optimize the sensor response and to
induce the gas pumping inside the microchannel by thermal creep phenomenon, therefore, no external
pumping system is required. The study of the pumping effect generation has been realized by thermal
and microfluidic simulations. Thermal simulations have been performed to estimate the thermal gradient
along the microchannel. In addition, the microfluidic modelling allows us to determine the mass flow
rate for different thermal gradient profiles, obtained from the thermal simulations. Finally, a complete
Pyrex microsystem has been realized to detect ammonia. The existence of the thermal pumping has been
demonstrated experimentally.
Domaines
Sciences de l'ingénieur [physics]Origine | Fichiers produits par l'(les) auteur(s) |
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