Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining
Résumé
We report on a functional experimental design for Bessel beam generation capable of handling high-energy ultra-short pulses (up to 1.2 mJ per pulse of 50 fs duration). This allows us to deliver intensities exceeding the breakdown threshold for air or any dielectric along controlled micro-filaments with lengths exceeding 4 mm. It represents an unprecedented upscaling in comparison to recent femtosecond Bessel beam micromachining experiments. We produce void microchannels through glass substrates to demonstrate that aspect ratios exceeding 1200: 1 can be achieved by using single high-intensity pulses. This demonstration must lead to new methodologies for deep-drilling and high-speed cutting applications. (C) 2015 Optical Society of America