@article{lepaven:hal-01404863, TITLE = {{Ferroelectric and dielectric study of strontium tantalum based perovskite oxynitride films deposited by reactive rf magnetron sputtering}}, AUTHOR = {Le Paven, Claire and Benzerga, Ratiba and Ferri, Anthony and Fasquelle, Didier and Laur, Vincent and Le Gendre, Laurent and Marlec, Florent and Tessier, Franck and Chevir{\'e}, Fran{\c c}ois and Desfeux, Rachel and Saitzek, S{\'e}bastien and Castel, Xavier and Sharaiha, Ala}, URL = {https://hal.science/hal-01404863}, JOURNAL = {{Materials Research Bulletin}}, PUBLISHER = {{Elsevier}}, VOLUME = {96}, NUMBER = {Part 2}, PAGES = {126-132}, YEAR = {2017}, MONTH = Dec, DOI = {10.1016/j.materresbull.2016.11.030}, KEYWORDS = {Oxynitride ; Perovskite ; Thin films ; Reactive sputtering ; Epitaxy ; Permittivity ; Ferroelectricity}, PDF = {https://hal.science/hal-01404863/file/LePaven_Materials%20Research%20Bulletin_2016b.pdf}, HAL_ID = {hal-01404863}, HAL_VERSION = {v1}, }