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Communication Dans Un Congrès Année : 2016

Dedicated test-structures for investigation of the thermal impact of the BEOL in advanced SiGe HBTs in time and frequency domain

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hal-01399905 , version 1 (21-11-2016)

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  • HAL Id : hal-01399905 , version 1

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Rosario d'Esposito, Sebastien Fregonese, Thomas Zimmer, Anjan Chakravorty. Dedicated test-structures for investigation of the thermal impact of the BEOL in advanced SiGe HBTs in time and frequency domain. 2016 International Conference on Microelectronic Test Structures (ICMTS), Mar 2016, Yokohama, Japan. ⟨hal-01399905⟩
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