Fabrication of Periodic 3D Nanostructuration for Optical Surfaces by Holographic Two-Photon-Polymerization
Résumé
This study fabricated periodic 3D nanostructures
by using a periodic voxel array for light extraction. Two-photon
polymerization (TPP) is a well-known technology used for
generating complex 3D micro- and nanostructures with
sub-
100
-nm resolution. Because of the periodic voxel-
by
-voxel
array fabrication process, the fabrication of holographic
two-photon polymerization (HTPP) can be faster than that of
traditional TPP. HTPP promises a flexible technique to
fabricate an arbitrary periodic 3D structured optical surface. In
this research, we used a 25 × 25 beam-splitting holographic
mask to generate a periodic focus in a photocured material and
to systematically fabricate complex 3D nanostructures at rates
of mm² per minute. The optical responses of nanostructures with
a 1 μm period fabricated in a polymer were characterized using
3D optical microscopy. The experimental results of the light
distribution demonstrated favorable agreement with those of the
simulation. In the light-extracting experiment, the light
extraction capability of the gold-layer nanostructures was 3.6
times higher than that of the glass without nanostructures.