Metal-oxide-silicon nanophotonics: An efficient integration of plasmonic nano-slots with silicon waveguides
Résumé
We demonstrate key elements of future plasmonic guided optics integrated with CMOS-compatible silicon photonics. Very efficient coupling is provided with metal nano-slot waveguides exhibiting unexpectedly low propagation losses and a broadband sub-50 nm optical confinement.
Mots clés
- co-directional couplers
- metallic slot waveguides
- Slotline
- silicon photonics
- Optical coupling
- Optical waveguides
- Plasmons
- Silicon
- surface plasmon polariton
- light propagation
- integrated optics
- elemental semiconductors
- CMOS integrated circuits
- plasmonic guided optics
- nanophotonics
- optical losses
- plasmonics
- CMOS-compatible silicon photonics
- Si
- metal nanoslot waveguides
- metal-oxide-silicon nanophotonics
- wavelength 50 nm
- silicon waveguides
- Couplings
- Couplers
- plasmonic nanoslots
- propagation losses
- optical confinement