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Conference Papers Year : 2016

Exploring Boltzmann-Factor Distributions of Precipitation-Nuclei in the TEM

Abstract

For nucleation in the solid-state, modern electron microscopes may allow one to examine pre-critical cluster distributions down to the size-scale of a single misplaced atom. A very specific challenge of this sort arises in the gigascale silicon integrated-circuit device industry, surrounding the important roles that oxygen in Czochralski silicon can play. We indicate here in particular that the number densities and sizes of precritical SiOx clusters in as-grown wafers, as estimated by elementary means, should be possible to quantify with modern techniques, provided that challenges associated with surface noise and thickness estimation can be overcome.
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Dates and versions

hal-01367881 , version 1 (16-09-2016)

Identifiers

  • HAL Id : hal-01367881 , version 1

Cite

Jamie Daugherty, P Fraundorf, David Osborn, Jai Kasthuri. Exploring Boltzmann-Factor Distributions of Precipitation-Nuclei in the TEM. Microscopy and Microanalysis 2016 meeting, Jul 2016, Columbus, Ohio, United States. pp.942-943. ⟨hal-01367881⟩
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