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Communication Dans Un Congrès Année : 2015

LTCC Technology for Microfluidic Applications Based on the Gap Waveguide Technology

Résumé

In recent years, Low Temperature Co-fired Ceramics (LTCC) have become an attractive technology for microwave and millimeter-wave components due to its high integration density, low dielectric loss at high frequencies, high thermal stability and compatibility with a wide range of assembly techniques. Recently, a number of researchers have demonstrated the use of LTCC to build integrated microelectromechanical and microfluidic device. In this work, we present a new LTCC microfluidic system based on the guiding structure called Gap Waveguide. In this kind of technology the waveguide is generated in a narrow gap between parallel metal plates. One of the plates is textured by a periodic pattern (metallic vias) acting as a High Impedance Surface (HIS) that prevents global parallel-plate modes from propagation. This work provides new performances on the Gap Waveguide concept for microfluidic applications using LTCC.

Domaines

Electronique
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Dates et versions

hal-01343432 , version 1 (08-07-2016)

Identifiants

  • HAL Id : hal-01343432 , version 1

Citer

Cristina Arenas Buendia, François Gallée, Alejandro Valero Nogueira, Christian Person. LTCC Technology for Microfluidic Applications Based on the Gap Waveguide Technology. EMPC 2015 : 20th European Microelectronics and Packaging Conference and Exhibition, Sep 2015, Friedrichshafen Allemagne. pp.1 - 5. ⟨hal-01343432⟩
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