Size-dependent Analysis and Experiments of Bulk PMN-PT [001] Piezoelectric Actuator for MOEMS Micro-Mirrors.
Résumé
This paper presents the modeling, fabrication, FEM simulation and validation of a PMN-PT [001], bulk micro-actuator intended dor integration in smart Micro-Opto-Electrical-Mechanicals Systems (MOEMS). Unlike the majority of piezoelectric materials, PMN-PT [001] has the ability to generate large-stroke out-of-plane actuation ; this is due to its high longitudinal piezoelectric coefficient of up to 4500 pm/V. After an introduction on MOEMS actuation, a concise modeling is given. The FEM simulations are then presented, highlighting actuation-induced shape specificities. The focus is placed on planar displacement and on possible shape generation. Actuation reached values as high as 680 nm for a 200 µm tick layer. Spherical shape generation was also studied. After presenting the fabrication of a basic piezo-patch mirror, the experimental verification is provided, outlining the influence of the contact interface size and nature.
Domaines
Automatique / RobotiqueOrigine | Fichiers produits par l'(les) auteur(s) |
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