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                <term xml:lang="en">optical waveguides</term>
                <term xml:lang="en">proton exchange</term>
                <term xml:lang="en">electro-optic effect</term>
                <term xml:lang="en">lithium niobate</term>
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              <p>It has been established, that proton-exchanged LiNbO 3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE) waveguides in comparison with annealed proton-exchanged (APE) ones. The experimental samples of phase modulators fabricated by SPE technique exhibit a better electro-optical efficiency compared to the LiNbO 3 modulators produced by the standard and improved APE techniques.</p>
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