This paper presents the results of modeling of a mixed non-linear, strongly coupled and multidomain electromechanical system designed to scavenge the energy of ambient vibrations and to generate an electrical supply for an embedded microsystem. The system is operating in three domains: purely mechanical (the resonator), coupled electromechanical (electrostatic transducer associated with the moving mass) and electrical circuit, including switches, diodes and linear electrical components. Although only linear networks can be properly modeled in SystemC-AMS, we propose a technique allowing modeling of electrical networks including non-linear components (diodes) as well as time-varying capacitors. The whole system was modeled using two solvers of SystemC-AMS simultaneously: the one allowing TDF (timed data flow) modeling and the one allowing LIN ELEC (linear electrical) circuit analysis. The modeling results are compared with VHDL-AMS and Matlab Simulink models.