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Article Dans Une Revue Applied Surface Science Année : 2014

Mastering the biaxial stress state in nanometric thin films on flexible substrates

Résumé

Biaxial stress state of thin films deposited on flexible substrate can be mastered thanks to a new biaxial device. This tensile machine allows applying in-plane loads F-x and F-y in the two principal directions x and y of a cruciform-shaped polymer substrate. The transmission of the deformation at film/substrate interface allows controlling the stress and strain field in the thin films. We show in this paper a few illustrations dealing with strain measurements in polycrystalline thin films deposited on flexible substrate. The potentialities of the biaxial device located at Soleil synchrotron are also discussed.
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Dates et versions

hal-01293582 , version 1 (25-03-2016)

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D. Faurie, P. -O. Renault, E. Le Bourhis, Guillaume Geandier, Philippe Goudeau, et al.. Mastering the biaxial stress state in nanometric thin films on flexible substrates. Applied Surface Science, 2014, 306, pp.70-74. ⟨10.1016/j.apsusc.2014.02.032⟩. ⟨hal-01293582⟩
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