Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH) - Archive ouverte HAL Access content directly
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Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH)

Raphaël Guillemet
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Philippe Basset
Tarik Bourouina

Abstract

This paper studies the vibration energy harvesting (VEH) capabilities for one electrostatic mechanism: the out-of-plane gap-closing (OPGC) converter. The goal is to maximize the output energy harvested from a MEMS device while preventing the integrity of the conditioning circuit. The originality of this work lies in the optimization taking into account both electrical and mechanical aspects and studying at the same time the consequence of the voltage limitations on the transducer. After a reminder of working principle of the VEH at constant charge, we'll propose an optimal design of the structure, analysing the consequences of an external acceleration's fluctuation and a way to remedy this with two different approaches. Also, we'll study the influence of the additional parallel (parasitic) capacitance.
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Dates and versions

hal-01290703 , version 1 (18-03-2016)

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  • HAL Id : hal-01290703 , version 1

Cite

Raphaël Guillemet, Philippe Basset, Dimitri Galayko, Tarik Bourouina. Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH). Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP), May 2010, Sevilla, Spain. pp.73-78. ⟨hal-01290703⟩
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