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Article Dans Une Revue Advanced Functional Materials Année : 2014

Water-Induced Phase Separation Forming Macrostructured Epitaxial Quartz Films on Silicon

Glenna L. Drisko
Adrian Carretero-Genevrier
Marti Gich
  • Fonction : Auteur
Jaume Gazquez
Djawhar Ferrah
  • Fonction : Auteur
  • PersonId : 975362
David Grosso
Cédric Boissière
Juan Rodriguez-Carvajal
  • Fonction : Auteur
  • PersonId : 877088
Clément Sanchez

Résumé

Quartz has been widely used as a bulk material in optics, the microelectronic industry, and sensors. The nanostructuring and direct integration of oriented quartz crystals onto a semiconductor platform has proven to be challenging. However, here, a new approach is presented to integrate epitaxial quartz films with macroperforations within the range of 500 nm and 1 mu m using chemical solution deposition. This method constitutes an appealing approach to develop piezoelectric mass sensors with enhanced resonance frequencies due to the thickness reduction. Perforated quartz films on (100)-silicon are prepared from amorphous silica films deposited via dip-coating and doped with metal cations that catalyze quartz crystallization. The metal cations are also active in the formation of the macroperforations, which arise due to a phase separation mechanism. Cationic surfactant-anion-metal cation assemblies stabilize droplets of water, creating an indentation in the hydrophilic silica matrix which remains after solvent evaporation. Many cations induce phase separation, including Li+, Na+, Sr2+, Mn2+, Fe2+/Fe3+, Ca2+, Ce3+ and La3+ but only the Sr2+ and Ca2+ cations in this series induce the epitaxial growth of alpha-quartz films under the conditions studied. The combination of sol-gel chemistry and epitaxial growth opens new opportunities for the integration of patterned quartz on silicon.

Domaines

Matériaux

Dates et versions

hal-01289935 , version 1 (17-03-2016)

Identifiants

Citer

Glenna L. Drisko, Adrian Carretero-Genevrier, Marti Gich, Jaume Gazquez, Djawhar Ferrah, et al.. Water-Induced Phase Separation Forming Macrostructured Epitaxial Quartz Films on Silicon. Advanced Functional Materials, 2014, 24 (35), pp.5494-5502. ⟨10.1002/adfm.201401066⟩. ⟨hal-01289935⟩
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