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Article Dans Une Revue Science Année : 2013

Soft-Chemistry-Based Routes to Epitaxial alpha-Quartz Thin Films with Tunable Textures

Résumé

Piezoelectric nanostructured quartz films of high resonance frequencies are needed for microelectronic devices; however, synthesis methods have been frustrated by the inhomogeneous crystal growth, crystal twinning, and loss of nanofeatures upon crystallization. We report the epitaxial growth of nanostructured polycrystalline quartz films on silicon [Si(100)] substrates via the solution deposition and gelation of amorphous silica thin films, followed by thermal treatment. Key to the process is the combined use of either a strontium (Sr2+) or barium (Ba2+) catalyst with an amphiphilic molecular template. The silica nanostructure constructed by cooperative self-assembly permits homogeneous distribution of the cations, which are responsible for the crystallization of quartz. The low mismatch between the silicon and a-quartz cell parameters selects this particular polymorph, inducing epitaxial growth.

Domaines

Matériaux
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Dates et versions

hal-01289775 , version 1 (17-03-2016)

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Citer

A. Carretero-Genevrier, M. Gich, L. Picas, J. Gazquez, G. L. Drisko, et al.. Soft-Chemistry-Based Routes to Epitaxial alpha-Quartz Thin Films with Tunable Textures. Science, 2013, 340 (6134), pp.827-831. ⟨10.1126/science.1232968⟩. ⟨hal-01289775⟩
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