One recurrent issue in software development processes are developer’s deviations from the process model. This problem is amplified in the context of multi-viewpoint-based development of complex systems where the system’s specification comes in form of different and intertwined viewpoints. Without a methodological support, these deviations become inevitable. They can be of different kinds: 1) behavioral deviations related to inappropriate actions performed by the developer when realizing process’s activities or 2) structural deviations due to inconsistencies in deliverables, which can be in conflict with other view-point’s outcomes. This paper proposes an approach to overcome these issues. To demonstrate the approach, a prototype was developed and the RM-ODP standard and a viewpoint-based development process were used.